4261atrEnvironment, Safety, and Health (ESH) Metrics for Semiconductor Manufacturing Equipment (SME)
International SEMATECH Technology Transfer #02034261A-TR
2002 International SEMATECH, Inc.InternationalSEMATECH and the InternationalSEMATECHlogo are registered service marks of International SEMATECH, Inc., a wholly-owned subsidiary of SEMATECH, Inc.Product names and company names used in this publication are for identification purposes only and may be
trademarks or service marks of their respective companies.Environment, Safety, and Health (ESH) Metrics for Semiconductor Manufacturing Equipment (SME) Technology Transfer #02034261A-TR International SEMATECH March 29, 2002 Abstract: This report from the International SEMATECH (ISMT) ESHF004 project identifies a set of key environment, safety, and health (ESH) performance parameters for semiconductor manufacturing equipment (SME) identified by the project working group during 2001 and refined by the ESH Program Advisory Group (PAG) during February 2002.
These metrics were developed to provide a uniform method for evaluating the ESH performance of SME.Future work planned in this area is described, including populating a database of equipment ESH metrics to permit the evaluation and comparison of ESH performance for selected SME, assist in the development of equipment ESH goals for the International Technology Roadmap for Semiconductors (ITRS), and provide focus for follow-on projects with SME suppliers to further improve equipment ESH performance.Keywords: Emissions Monitoring, Equipment Safety, Environmental Standards, Performance Specifications Author(s): Peter Dahlgren Approvals: Peter Dahlgren, Program Manager Coleen Miller, Director Laurie Modrey, Technical Information Transfer Team Leader International SEMATECH Technology Transfer #02034261A-TR Table of Contents EXECUTIVE ESH METRICS AND of Tables Table 1 Equipment ESH Metrics Table 2 Equipment ESH Metrics Definitions and Test Technology Transfer #02034261A-TR International SEMATECH Acknowledgments The author would like to thank Holly Ho (TSMC assignee to ISMT), the member company and supplier participants of the ISMT project ESHF004 working group, the individual company participants on the Semiconductor Equipment and Materials International (SEMI) EHS metrics taskforce, and the ISMT Program Advisory Group (PAG) for their support.International SEMATECH Technology Transfer #02034261A-TR 1 EXECUTIVE SUMMARY During 2001, the International SEMATECH (ISMT) ESHF004 Equipment ESH and Metrics project working group established a uniform set of equipment environment, safety, and health (ESH) metrics
.The purpose of establishing these metrics was to permit ongoing 1) evaluation of the ESH performance of newer 300 mm semiconductor manufacturing equipment (SME) compared to 200 mm SME; 2) verification and documentation of the ESH performance of SME to goals in the International Technology Roadmap for Semiconductors (ITRS); 3) determination of potential areas of ESH improvement for further research with SME suppliers; and 4) identification of key data for inputs to Life Cycle Assessment (LCA) models.
A longer-term goal is to quantify reasonable ranges for the ESH performance of each type of SME to help refine ITRS targets.
2 BACKGROUND Since the late 1990s, interest regarding the quantification of the ESH performance of semiconductor manufacturing facilities and equipment has steadily increased among the semiconductor industry and various governmental and non-governmental bodies.
Examples of this ongoing development work can be found in the following sources: The Semiconductor Industry Association (SIA) Environmental Metrics Program, which tracks five key facility-level ESH metrics for participating fabricators  Development of facility, process, and equipment ESH goals in the ITRS  The Semiconductor Equipment and Materials International (SEMI) Global Care program and development of a SEMI guideline for establishing equipment-level ESH metrics  World Semiconductor Council (WSC) initiatives to establish semiconductor industry consensus on ESH goals  International Organization for Standardization (ISO)  Industry publications and books 
United States Environmental Protection Agency (USEPA)  Annual corporate environmental reports from SME suppliers and device manufacturers In 2000, ISMT member companies identified the need and approved 2001 funding for establishing a standard set of equipment ESH metrics that would build upon and expand the scope of previous work completed at ISMT.Past work focused on equipment energy and utility consumption measurements and optimization studies.The task of establishing an overall, standard set of equipment ESH metrics was directed to the ESHF004 project.
During 2002, this project was renamed Equipment ESH & Metrics to reflect a greater emphasis on the refinement and collection of equipment ESH metrics data.Close collaboration with the ISMT energy and water optimization projects was established to standardize measurement techniques and share data collection to make optimal use of available contract funding.Technology Transfer #02034261A-TR International SEMATECH 3 EQUIPMENT ESH METRICS AND DEFINITIONS During 2001, a set of 15 metrics defining equipment ESH performance was generated and approved by the ISMT ESHF004 project working group through participation in teleconferences, emails, and face-to-face working group meetings.The ISMT ESH Program Advisory Group (PAG) elected to modify the list at the February 2002 PAG meeting by adding exhaust consumption, removing some metrics that did not receive the broadest member company support, and expanding the S2/S8 non-conformance metrics by delineating non-conformances by overall risk ranking category according to SEMI S10 definitions.The industry still has some difference of opinion on whether hazards identified in third-party S2/S8 evaluati